Transparent polycrystalline cubic silicon nitride

نویسندگان

  • Norimasa Nishiyama
  • Ryo Ishikawa
  • Hiroaki Ohfuji
  • Hauke Marquardt
  • Alexander Kurnosov
  • Takashi Taniguchi
  • Byung-Nam Kim
  • Hidehiro Yoshida
  • Atsunobu Masuno
  • Jozef Bednarcik
  • Eleonora Kulik
  • Yuichi Ikuhara
  • Fumihiro Wakai
  • Tetsuo Irifune
چکیده

Glasses and single crystals have traditionally been used as optical windows. Recently, there has been a high demand for harder and tougher optical windows that are able to endure severe conditions. Transparent polycrystalline ceramics can fulfill this demand because of their superior mechanical properties. It is known that polycrystalline ceramics with a spinel structure in compositions of MgAl2O4 and aluminum oxynitride (γ-AlON) show high optical transparency. Here we report the synthesis of the hardest transparent spinel ceramic, i.e. polycrystalline cubic silicon nitride (c-Si3N4). This material shows an intrinsic optical transparency over a wide range of wavelengths below its band-gap energy (258 nm) and is categorized as one of the third hardest materials next to diamond and cubic boron nitride (cBN). Since the high temperature metastability of c-Si3N4 in air is superior to those of diamond and cBN, the transparent c-Si3N4 ceramic can potentially be used as a window under extremely severe conditions.

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Infrared optical properties of mixed-phase thin films studied by spectroscopic ellipsometry using boron nitride as an example

Infrared optical properties of mixed-phase thin films studied by spectroscopic ellipsometry using boron nitride as an example" (1997). We present a microstructure-dependent anisotropic infrared-optical dielectric function model for mixed-phase polycrystalline material from which we derive the transverse and longitudinal-optical modes observable in thin films. Infrared ellipsometry over the wave...

متن کامل

Phase and microstructure investigations of boron nitride thin films by spectroscopic ellipsometry in the visible and infrared spectral range

Phase and microstructure investigations of boron nitride thin films by spectroscopic ellipsometry in the visible and infrared spectral range" (1997). Faculty Publications from the Department of Electrical and Computer Engineering. 64. Spectroscopic ellipsometry over the spectral range from 700 to 3000 cm Ϫ1 and from 1.5 to 3.5 eV is used to simultaneously determine phase and microstructure of p...

متن کامل

Synthesis of Boron-Aluminum Nitride Thin Film by Chemical Vapour Deposition Using Gas Bubbler

Boron included aluminium nitride (B-AlN) thin films were synthesized on silicon (Si) substrates through chemical vapour deposition ( CVD ) at 773 K (500 °C). tert-buthylamine (tBuNH2) solution was used as nitrogen source and delivered through gas bubbler. B-AlN thin films were prepared on Si-100 substrates by varying gas mixture ratio of three precursors. The structural properties of the films ...

متن کامل

Highly selective etching of silicon nitride over silicon and silicon dioxide

A highly selective dry etching process for the removal of silicon nitride ~Si3N4) layers from silicon and silicon dioxide (SiO2) is described and its mechanism examined. This new process employs a remote O2 /N2 discharge with much smaller flows of CF4 or NF3 as a fluorine source as compared to conventional Si3N4 removal processes. Etch rates of Si3N4 of more than 30 nm/min were achieved for CF4...

متن کامل

In situ infrared and visible-light ellipsometric investigations of boron nitride thin films at elevated temperatures

In situ infrared and visible-light ellipsometric investigations of boron nitride thin films at elevated temperatures situ infrared and visible-light ellipsometric investigations of boron nitride thin films at elevated temperatures" (1998). Faculty Publications from the Department of Electrical and Computer Engineering. 14. In situ infrared ͑IR͒ spectroscopy and visible-light ͑VIS͒ spectroscopic ell...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

عنوان ژورنال:

دوره 7  شماره 

صفحات  -

تاریخ انتشار 2017